Low resistance wavelength-reproducible [ital p]-type (Al,Ga)As distributed Bragg reflectors grown by molecular beam epitaxy

We report the reproducible molecular beam epitaxial growth of Be-doped piecewise linearly graded (Al,Ga)As distributed Bragg reflectors that have vertical series resistivities near bulk values. For mirrors with three linear segments per interface, the center wavelength reproducibility is 0.1% and th...

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Bibliographic Details
Published in:Applied physics letters 1993-04, Vol.62:14
Main Authors: Chalmers, S.A., Lear, K.L., Killeen, K.P.
Format: Article
Language:English
Subjects:
360601 - Other Materials- Preparation & Manufacture
360606 - Other Materials- Physical Properties- (1992-)
426002 - Engineering- Lasers & Masers- (1990-)
ALLOY SYSTEMS
ALLOYS
ALUMINIUM ARSENIDES
ALUMINIUM COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BERYLLIUM ADDITIONS
BERYLLIUM ALLOYS
BRAGG REFLECTION
CURRENTS
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ENGINEERING
EPITAXY
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
LASERS
MATERIALS
MATERIALS SCIENCE
MIRRORS
MOLECULAR BEAM EPITAXY
OPTICAL PROPERTIES
P-TYPE CONDUCTORS
PHYSICAL PROPERTIES
PNICTIDES
REFLECTION
REFLECTIVITY
SEMICONDUCTOR DEVICES
SEMICONDUCTOR LASERS
SEMICONDUCTOR MATERIALS
SOLID STATE LASERS
SURFACE PROPERTIES
TERNARY ALLOY SYSTEMS
THRESHOLD CURRENT
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Description
Summary:We report the reproducible molecular beam epitaxial growth of Be-doped piecewise linearly graded (Al,Ga)As distributed Bragg reflectors that have vertical series resistivities near bulk values. For mirrors with three linear segments per interface, the center wavelength reproducibility is 0.1% and the series resistivity is as low as 1.8[times]10[sup [minus]5] [Omega] cm[sup 2] for hole concentrations of 5[times]10[sup 18] cm[sup [minus]3]. Measured reflectivities of 6.0% per interface are comparable to conventional single-linear-grade mirrors. Vertical-cavity surface-emitting lasers incorporating these mirrors exhibit record-low voltage thresholds of less than 1.5 V.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.109608