Nondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics

We demonstrate that picosecond ultrasonics is a sensitive nondestructive probe of the formation of TiSi2 from the reaction of titanium films on silicon annealed at temperatures of 300–800 °C. From the measured change in optical reflectivity, the responses due to electronic excitation, acoustic echoe...

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Bibliographic Details
Published in:Applied physics letters 1992-11, Vol.61 (22), p.2700-2702
Main Authors: LIN, H.-N, STONER, R. J, MARIS, H. J, HARPER, J. M. E, CABRAL, C. JR, HALBOUT, J.-M, RUBLOFF, G.W
Format: Article
Language:English
Subjects:
360601 - Other Materials- Preparation & Manufacture
ACOUSTIC TESTING
ANNEALING
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
GROWTH
HEAT TREATMENTS
HEATING
LASER-RADIATION HEATING
MATERIALS SCIENCE
MATERIALS TESTING
MEASURING METHODS
MONITORING
NONDESTRUCTIVE TESTING
OPTICAL PUMPING
OPTICAL REFLECTION
PHASE TRANSFORMATIONS
Physics
PLASMA HEATING
PUMPING
REFLECTION
SILICIDES
SILICON COMPOUNDS
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
TESTING
Thin film structure and morphology
TITANIUM COMPOUNDS
TITANIUM SILICIDES
TRANSITION ELEMENT COMPOUNDS
ULTRASONIC TESTING
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Summary:We demonstrate that picosecond ultrasonics is a sensitive nondestructive probe of the formation of TiSi2 from the reaction of titanium films on silicon annealed at temperatures of 300–800 °C. From the measured change in optical reflectivity, the responses due to electronic excitation, acoustic echoes, and thermal coupling to the underlying Si are resolved. The results show significant differences in the electronic response and the ultrasonic echo pattern before and after the structural phases C49 and C54 TiSi2 are formed. The longitudinal sound velocity is measured to be (8.3±0.2)×105 cm/s for C49 TiSi2, and about 5% lower for the C54 phase.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.108114