Effects of temperature and filament poisoning on diamond growth in hot-filament reactors

The growth of diamond in a hot-filament reactor has been modeled, and compared with existing experimental data. Studies have been carried out on non-growth systems containing only hydrogen, as well as on systems where the methane concentration at the inlet was varied between 0.4% and 7.2%. The one-d...

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Bibliographic Details
Published in:Journal of applied physics 1994-09, Vol.76 (5), p.3102-3113
Main Authors: Dandy, David S., Coltrin, Michael E.
Format: Article
Language:English
Subjects:
ALKANES
CARBON
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIAMONDS
ELEMENTAL MINERALS
ELEMENTS
FILAMENTS
FLUID FLOW
GROWTH
HYDROCARBONS
HYDROGEN
IRRADIATION REACTORS
MATERIALS PROCESSING REACTORS
MATERIALS SCIENCE
METHANE
MINERALS
NONMETALS
ORGANIC COMPOUNDS
REACTORS
SURFACE COATING 360606 > Other Materials-- Physical Properties-- (1992-)
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Summary:The growth of diamond in a hot-filament reactor has been modeled, and compared with existing experimental data. Studies have been carried out on non-growth systems containing only hydrogen, as well as on systems where the methane concentration at the inlet was varied between 0.4% and 7.2%. The one-dimensional stagnation flow model used here includes detailed gas-phase and surface kinetics. A simple model of filament poisoning has been implemented. The effect of the gas/filament temperature discontinuity on species distributions has also been examined. Gross errors between theory and experiment are obtained when filament poisoning is neglected, but good agreement is found using a simple linear poisoning model. A nonzero temperature discontinuity at the filament produces good overall agreement with experiment.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.357492