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Kinetic model of a DC oxygen glow discharge
A simple kinetic model predicting the concentration of oxygen atoms, metastable singlet molecules O{sub 2}(a{sup 1}{Delta}) and negative ions O{minus} in the positive column of a DC glow discharge is developed. The calculated O and O{sub 2}(a{sup 1}{Delta}) concentrations are compared to previously...
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Published in: | Plasma chemistry and plasma processing 1989-06, Vol.9 (2), p.189-206 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A simple kinetic model predicting the concentration of oxygen atoms, metastable singlet molecules O{sub 2}(a{sup 1}{Delta}) and negative ions O{minus} in the positive column of a DC glow discharge is developed. The calculated O and O{sub 2}(a{sup 1}{Delta}) concentrations are compared to previously reported measurements for pressures p = 0.2-2 Torr and discharge currents I = 10-80 mA. The electron density calculated from the continuity equation j = n{sub e}e v{sub d} agrees well experiment. The rate coefficients for electron impact processes used in the balance equations of O, O{sub 2}(a{sup 1}{Delta}), and O{sup {minus}} were taken from the literature as a function of the reduced electric field E/N for E/N = 40-80 Td. A reasonable agreement is obtained between the model and the experiment with a set of 10 reactions for the production and destruction of the above-mentioned species. |
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ISSN: | 0272-4324 1572-8986 |
DOI: | 10.1007/BF01054280 |