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Tungsten-containing amorphous carbon films deposited by pulsedvacuum arc
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Published in: | Thin solid films 1999-10, Vol.342 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/S0040-6090(98)01441-2 |