Caesium sputter ion source compatible with commercial SIMS instruments

A simple design for a caesium sputter cluster ion source compatible with commercially available secondary ion mass spectrometers is reported. This source has been tested with the Cameca IMS 4f instrument using the cluster Si n − and Cu n − ions, and will shortly be retrofitted to the floating low en...

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Bibliographic Details
Published in:Applied surface science 2006-07, Vol.252 (19), p.7321-7325
Main Authors: Belykh, S.F., Palitsin, V.V., Veryovkin, I.V., Kovarsky, A.P., Chang, R.J.H., Adriaens, A., Dowsett, M., Adams, F.
Format: Article
Language:English
Subjects:
Atomic and cluster ion bombardment
ATOMIC AND MOLECULAR PHYSICS
ATOMIC IONS
Caesium sputter ion source
CESIUM
Cluster–solid interaction
Depth profiling
DESIGN
Floating low energy ion gun
ION EMISSION
ION SOURCES
MASS SPECTROMETERS
Non-additive sputtering
PROJECTILES
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Summary:A simple design for a caesium sputter cluster ion source compatible with commercially available secondary ion mass spectrometers is reported. This source has been tested with the Cameca IMS 4f instrument using the cluster Si n − and Cu n − ions, and will shortly be retrofitted to the floating low energy ion gun (FLIG) of the type used on the Cameca 4500/4550 quadruple instruments. Our experiments with surface characterization and depth profiling conducted to date demonstrate improvements of analytical capabilities of the SIMS instrument due to the non-additive enhancement of secondary ion emission and shorter ion ranges of polyatomic projectiles compared to atomic ions with the same impact energy.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2006.02.172