Bonded Multilayer Laue Lens for focusing hard X-rays

We have fabricated partial Multilayer Laue Lens (MLL) linear zone plate structures with thousands of alternating WSi 2 and Si layers and various outermost zone widths according to the Fresnel zone plate formula. Using partial MLL structures, we were able to focus hard X-rays to line foci with a widt...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2007-11, Vol.582 (1), p.123-125
Main Authors: Liu, Chian, Conley, R., Qian, J., Kewish, C.M., Macrander, A.T., Maser, J., Kang, H.C., Yan, H., Stephenson, G.B.
Format: Article
Language:English
Subjects:
Au–Sn bonding
DESIGN
ENGINEERING
FABRICATION
FOCUSING
GOLD ALLOYS
HARD X RADIATION
LAMELLAE
LAUE METHOD
LENSES
MATERIALS SCIENCE
Multilayer
Multilayer Laue Lens
Nanofocusing
SILICON
TIN ALLOYS
TUNGSTEN SILICIDES
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Summary:We have fabricated partial Multilayer Laue Lens (MLL) linear zone plate structures with thousands of alternating WSi 2 and Si layers and various outermost zone widths according to the Fresnel zone plate formula. Using partial MLL structures, we were able to focus hard X-rays to line foci with a width of 30 nm and below. Here, we describe challenges and approaches used to bond these multilayers to achieve line and point focusing. Bonding was done by coating two multilayers with AuSn and heating in a vacuum oven at 280–300 °C. X-ray reflectivity measurements confirmed that there was no change in the multilayers after heating to 350 °C. A bonded MLL was polished to a 5–25 μm wedge without cracking. SEM image analyses found well-positioned multilayers after bonding. These results demonstrate the feasibility of a bonded full MLL for focusing hard X-rays.
ISSN:0168-9002
1872-9576
DOI:10.1016/j.nima.2007.08.077