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Bonded Multilayer Laue Lens for focusing hard X-rays
We have fabricated partial Multilayer Laue Lens (MLL) linear zone plate structures with thousands of alternating WSi 2 and Si layers and various outermost zone widths according to the Fresnel zone plate formula. Using partial MLL structures, we were able to focus hard X-rays to line foci with a widt...
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| Published in: | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2007-11, Vol.582 (1), p.123-125 |
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| Language: | English |
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| cited_by | cdi_FETCH-LOGICAL-c326t-7706fa22ff4fb3b3a666b95336f195d29a7188353d516c40be3aeb129cf08fb83 |
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| cites | cdi_FETCH-LOGICAL-c326t-7706fa22ff4fb3b3a666b95336f195d29a7188353d516c40be3aeb129cf08fb83 |
| container_end_page | 125 |
| container_issue | 1 |
| container_start_page | 123 |
| container_title | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
| container_volume | 582 |
| creator | Liu, Chian Conley, R. Qian, J. Kewish, C.M. Macrander, A.T. Maser, J. Kang, H.C. Yan, H. Stephenson, G.B. |
| description | We have fabricated partial Multilayer Laue Lens (MLL) linear zone plate structures with thousands of alternating WSi
2 and Si layers and various outermost zone widths according to the Fresnel zone plate formula. Using partial MLL structures, we were able to focus hard X-rays to line foci with a width of 30
nm and below. Here, we describe challenges and approaches used to bond these multilayers to achieve line and point focusing. Bonding was done by coating two multilayers with AuSn and heating in a vacuum oven at 280–300
°C. X-ray reflectivity measurements confirmed that there was no change in the multilayers after heating to 350
°C. A bonded MLL was polished to a 5–25
μm wedge without cracking. SEM image analyses found well-positioned multilayers after bonding. These results demonstrate the feasibility of a bonded full MLL for focusing hard X-rays. |
| doi_str_mv | 10.1016/j.nima.2007.08.077 |
| format | article |
| fullrecord | <record><control><sourceid>elsevier_osti_</sourceid><recordid>TN_cdi_osti_scitechconnect_935930</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0168900207017731</els_id><sourcerecordid>S0168900207017731</sourcerecordid><originalsourceid>FETCH-LOGICAL-c326t-7706fa22ff4fb3b3a666b95336f195d29a7188353d516c40be3aeb129cf08fb83</originalsourceid><addsrcrecordid>eNp9kMtKxDAUhoMoOI6-gKv6AK0nyTQXcKODN6i4UXAX0lycDGMqSUeYtzelrj1wOJvv_zl8CF1iaDBgdr1tYvjSDQHgDYgGOD9CCyw4qWXL2TFaFEjUEoCcorOct1BGcrFAq7shWmerl_1uDDt9cKnq9N5VnYu58kMqa_Y5xM9qo5OtPuqkD_kcnXi9y-7i7y7R-8P92_qp7l4fn9e3XW0oYWPNOTCvCfF-5XvaU80Y62VLKfNYtpZIzbEQtKW2xcysoHdUux4TaTwI3wu6RFdz75DHoLIJozMbM8TozKgkbSWFwpCZMWnIOTmvvlNRkQ4Kg5rcqK2a3KjJjQKhipsSuplDrnz_E1yayl00zoY0ddsh_Bf_BajTa78</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Bonded Multilayer Laue Lens for focusing hard X-rays</title><source>ScienceDirect Freedom Collection 2022-2024</source><creator>Liu, Chian ; Conley, R. ; Qian, J. ; Kewish, C.M. ; Macrander, A.T. ; Maser, J. ; Kang, H.C. ; Yan, H. ; Stephenson, G.B.</creator><creatorcontrib>Liu, Chian ; Conley, R. ; Qian, J. ; Kewish, C.M. ; Macrander, A.T. ; Maser, J. ; Kang, H.C. ; Yan, H. ; Stephenson, G.B. ; Argonne National Lab. (ANL), Argonne, IL (United States)</creatorcontrib><description>We have fabricated partial Multilayer Laue Lens (MLL) linear zone plate structures with thousands of alternating WSi
2 and Si layers and various outermost zone widths according to the Fresnel zone plate formula. Using partial MLL structures, we were able to focus hard X-rays to line foci with a width of 30
nm and below. Here, we describe challenges and approaches used to bond these multilayers to achieve line and point focusing. Bonding was done by coating two multilayers with AuSn and heating in a vacuum oven at 280–300
°C. X-ray reflectivity measurements confirmed that there was no change in the multilayers after heating to 350
°C. A bonded MLL was polished to a 5–25
μm wedge without cracking. SEM image analyses found well-positioned multilayers after bonding. These results demonstrate the feasibility of a bonded full MLL for focusing hard X-rays.</description><identifier>ISSN: 0168-9002</identifier><identifier>EISSN: 1872-9576</identifier><identifier>DOI: 10.1016/j.nima.2007.08.077</identifier><language>eng</language><publisher>United States: Elsevier B.V</publisher><subject>Au–Sn bonding ; DESIGN ; ENGINEERING ; FABRICATION ; FOCUSING ; GOLD ALLOYS ; HARD X RADIATION ; LAMELLAE ; LAUE METHOD ; LENSES ; MATERIALS SCIENCE ; Multilayer ; Multilayer Laue Lens ; Nanofocusing ; SILICON ; TIN ALLOYS ; TUNGSTEN SILICIDES</subject><ispartof>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2007-11, Vol.582 (1), p.123-125</ispartof><rights>2007</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c326t-7706fa22ff4fb3b3a666b95336f195d29a7188353d516c40be3aeb129cf08fb83</citedby><cites>FETCH-LOGICAL-c326t-7706fa22ff4fb3b3a666b95336f195d29a7188353d516c40be3aeb129cf08fb83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,780,784,885,27924,27925</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/935930$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Liu, Chian</creatorcontrib><creatorcontrib>Conley, R.</creatorcontrib><creatorcontrib>Qian, J.</creatorcontrib><creatorcontrib>Kewish, C.M.</creatorcontrib><creatorcontrib>Macrander, A.T.</creatorcontrib><creatorcontrib>Maser, J.</creatorcontrib><creatorcontrib>Kang, H.C.</creatorcontrib><creatorcontrib>Yan, H.</creatorcontrib><creatorcontrib>Stephenson, G.B.</creatorcontrib><creatorcontrib>Argonne National Lab. (ANL), Argonne, IL (United States)</creatorcontrib><title>Bonded Multilayer Laue Lens for focusing hard X-rays</title><title>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment</title><description>We have fabricated partial Multilayer Laue Lens (MLL) linear zone plate structures with thousands of alternating WSi
2 and Si layers and various outermost zone widths according to the Fresnel zone plate formula. Using partial MLL structures, we were able to focus hard X-rays to line foci with a width of 30
nm and below. Here, we describe challenges and approaches used to bond these multilayers to achieve line and point focusing. Bonding was done by coating two multilayers with AuSn and heating in a vacuum oven at 280–300
°C. X-ray reflectivity measurements confirmed that there was no change in the multilayers after heating to 350
°C. A bonded MLL was polished to a 5–25
μm wedge without cracking. SEM image analyses found well-positioned multilayers after bonding. These results demonstrate the feasibility of a bonded full MLL for focusing hard X-rays.</description><subject>Au–Sn bonding</subject><subject>DESIGN</subject><subject>ENGINEERING</subject><subject>FABRICATION</subject><subject>FOCUSING</subject><subject>GOLD ALLOYS</subject><subject>HARD X RADIATION</subject><subject>LAMELLAE</subject><subject>LAUE METHOD</subject><subject>LENSES</subject><subject>MATERIALS SCIENCE</subject><subject>Multilayer</subject><subject>Multilayer Laue Lens</subject><subject>Nanofocusing</subject><subject>SILICON</subject><subject>TIN ALLOYS</subject><subject>TUNGSTEN SILICIDES</subject><issn>0168-9002</issn><issn>1872-9576</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNp9kMtKxDAUhoMoOI6-gKv6AK0nyTQXcKODN6i4UXAX0lycDGMqSUeYtzelrj1wOJvv_zl8CF1iaDBgdr1tYvjSDQHgDYgGOD9CCyw4qWXL2TFaFEjUEoCcorOct1BGcrFAq7shWmerl_1uDDt9cKnq9N5VnYu58kMqa_Y5xM9qo5OtPuqkD_kcnXi9y-7i7y7R-8P92_qp7l4fn9e3XW0oYWPNOTCvCfF-5XvaU80Y62VLKfNYtpZIzbEQtKW2xcysoHdUux4TaTwI3wu6RFdz75DHoLIJozMbM8TozKgkbSWFwpCZMWnIOTmvvlNRkQ4Kg5rcqK2a3KjJjQKhipsSuplDrnz_E1yayl00zoY0ddsh_Bf_BajTa78</recordid><startdate>20071111</startdate><enddate>20071111</enddate><creator>Liu, Chian</creator><creator>Conley, R.</creator><creator>Qian, J.</creator><creator>Kewish, C.M.</creator><creator>Macrander, A.T.</creator><creator>Maser, J.</creator><creator>Kang, H.C.</creator><creator>Yan, H.</creator><creator>Stephenson, G.B.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20071111</creationdate><title>Bonded Multilayer Laue Lens for focusing hard X-rays</title><author>Liu, Chian ; Conley, R. ; Qian, J. ; Kewish, C.M. ; Macrander, A.T. ; Maser, J. ; Kang, H.C. ; Yan, H. ; Stephenson, G.B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c326t-7706fa22ff4fb3b3a666b95336f195d29a7188353d516c40be3aeb129cf08fb83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Au–Sn bonding</topic><topic>DESIGN</topic><topic>ENGINEERING</topic><topic>FABRICATION</topic><topic>FOCUSING</topic><topic>GOLD ALLOYS</topic><topic>HARD X RADIATION</topic><topic>LAMELLAE</topic><topic>LAUE METHOD</topic><topic>LENSES</topic><topic>MATERIALS SCIENCE</topic><topic>Multilayer</topic><topic>Multilayer Laue Lens</topic><topic>Nanofocusing</topic><topic>SILICON</topic><topic>TIN ALLOYS</topic><topic>TUNGSTEN SILICIDES</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Liu, Chian</creatorcontrib><creatorcontrib>Conley, R.</creatorcontrib><creatorcontrib>Qian, J.</creatorcontrib><creatorcontrib>Kewish, C.M.</creatorcontrib><creatorcontrib>Macrander, A.T.</creatorcontrib><creatorcontrib>Maser, J.</creatorcontrib><creatorcontrib>Kang, H.C.</creatorcontrib><creatorcontrib>Yan, H.</creatorcontrib><creatorcontrib>Stephenson, G.B.</creatorcontrib><creatorcontrib>Argonne National Lab. (ANL), Argonne, IL (United States)</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Liu, Chian</au><au>Conley, R.</au><au>Qian, J.</au><au>Kewish, C.M.</au><au>Macrander, A.T.</au><au>Maser, J.</au><au>Kang, H.C.</au><au>Yan, H.</au><au>Stephenson, G.B.</au><aucorp>Argonne National Lab. (ANL), Argonne, IL (United States)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Bonded Multilayer Laue Lens for focusing hard X-rays</atitle><jtitle>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment</jtitle><date>2007-11-11</date><risdate>2007</risdate><volume>582</volume><issue>1</issue><spage>123</spage><epage>125</epage><pages>123-125</pages><issn>0168-9002</issn><eissn>1872-9576</eissn><abstract>We have fabricated partial Multilayer Laue Lens (MLL) linear zone plate structures with thousands of alternating WSi
2 and Si layers and various outermost zone widths according to the Fresnel zone plate formula. Using partial MLL structures, we were able to focus hard X-rays to line foci with a width of 30
nm and below. Here, we describe challenges and approaches used to bond these multilayers to achieve line and point focusing. Bonding was done by coating two multilayers with AuSn and heating in a vacuum oven at 280–300
°C. X-ray reflectivity measurements confirmed that there was no change in the multilayers after heating to 350
°C. A bonded MLL was polished to a 5–25
μm wedge without cracking. SEM image analyses found well-positioned multilayers after bonding. These results demonstrate the feasibility of a bonded full MLL for focusing hard X-rays.</abstract><cop>United States</cop><pub>Elsevier B.V</pub><doi>10.1016/j.nima.2007.08.077</doi><tpages>3</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0168-9002 |
| ispartof | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2007-11, Vol.582 (1), p.123-125 |
| issn | 0168-9002 1872-9576 |
| language | eng |
| recordid | cdi_osti_scitechconnect_935930 |
| source | ScienceDirect Freedom Collection 2022-2024 |
| subjects | Au–Sn bonding DESIGN ENGINEERING FABRICATION FOCUSING GOLD ALLOYS HARD X RADIATION LAMELLAE LAUE METHOD LENSES MATERIALS SCIENCE Multilayer Multilayer Laue Lens Nanofocusing SILICON TIN ALLOYS TUNGSTEN SILICIDES |
| title | Bonded Multilayer Laue Lens for focusing hard X-rays |
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