Fabrication of 10nm diameter carbon nanopores

The addition of carbon to samples, during imaging, presents a barrier to accurate TEM analysis, the controlled deposition of hydrocarbons by a focused electron beam can be a useful technique for local nanometer-scale sculpting of material. Here we use hydrocarbon deposition to form nanopores from la...

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Bibliographic Details
Published in:Applied physics letters 2008-09
Main Authors: Radenovic, Aleksandra, Trepagnier, Eliane, Csencsits, Roseann, Downing, Kenneth H, Liphardt, Jan
Format: Article
Language:English
Subjects:
36
74
CARBON
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRON BEAMS
FABRICATION
HYDROCARBONS
ION BEAMS
MEMBRANES
nanopores, DNA sequencing, single-molecule measurements
SILICON NITRIDES
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Summary:The addition of carbon to samples, during imaging, presents a barrier to accurate TEM analysis, the controlled deposition of hydrocarbons by a focused electron beam can be a useful technique for local nanometer-scale sculpting of material. Here we use hydrocarbon deposition to form nanopores from larger focused ion beam (FIB) holes in silicon nitride membranes. Using this method, we close 100-200nm diameter holes to diameters of 10nm and below, with deposition rates of 0.6nm per minute. I-V characteristics of electrolytic flow through these nanopores agree quantitatively with a one dimensional model at all examined salt concentrations.
ISSN:0003-6951
1077-3118