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Behaviour of poly-Si1-xGex-gated MOS capacitors under different electrical stress conditions in the direct tunnelling regime
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Published in: | Semiconductor science and technology 2001-06, Vol.16 (6), p.478-482 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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ISSN: | 0268-1242 1361-6641 |
DOI: | 10.1088/0268-1242/16/6/311 |