Bidirectional reflectance distribution function of rough silicon wafers

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Bibliographic Details
Published in:International journal of thermophysics 2001-07, Vol.22 (4), p.1311-1326
Main Authors: SHEN, Y. J, ZHANG, Z. M, TSAI, B. K, DEWITT, D. P
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Elemental semiconductors and insulators
Exact sciences and technology
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
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ISSN:0195-928X
1572-9567
DOI:10.1023/A:1010636914347