Effect of aspect ratio on topographic dependent charging in oxide etching

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2001-10, Vol.34 (19), p.2950-2955
Main Authors: Matsui, Jun, Maeshige, Kazunobu, Makabe, Toshiaki
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Surface treatments
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/34/19/304