BCN coatings on polymer substrates by plasma CVD at low temperature

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Bibliographic Details
Main Authors: WÖHLE, J, AHN, H, RIE, K.-T
Format: Conference Proceeding
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Online Access:Get full text
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ISSN:0257-8972
1879-3347