SiGe CMOS fabrication using SiGe MBE and anodic/LTO gate oxide

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Bibliographic Details
Published in:Semiconductor science and technology 2000-02, Vol.15 (2), p.135-138
Main Authors: Sidek, R M, Straube, U N, Waite, A M, Evans, A G R, Parry, C, Phillips, P, Whall, T E, Parker, E H C
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/15/2/310