Polycrystalline silicon films prepared by improved pulsed rapid thermal annealing: Materials for energy conversion

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Bibliographic Details
Published in:Solar energy materials and solar cells 2000, Vol.62 (1-2), p.143-148
Main Authors: YUWEN ZHAO, WENJING WANG, FENG YUN, YING XU, XIANBO LIAO, ZHIXUN MA, GUOZHEN YUE, GUANGLIN KONG
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0927-0248
1879-3398