AlN thin films deposited by pulsed laser ablation, sputtering and filtered arc techniques

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Bibliographic Details
Main Authors: BATHE, Ravi, VISPUTE, R. D, BHATTACHARYA, R, HABERSAT, Dan, SHARMA, R. P, VENKATESAN, T, SCOZZIE, C. J, ERVIN, Matt, GEIL, B. R, LELIS, A. J, DIKSHIT, S. J
Format: Conference Proceeding
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Laser deposition
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Online Access:Get full text
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ISSN:0040-6090
1879-2731