A MEMS-based flexible sensor and actuator system for space inflatable structures: Space applications for MEMS

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Bibliographic Details
Published in:Smart materials and structures 2001, Vol.10 (6), p.1230-1239
Main Authors: TUNG, Steve, WITHERSPOON, Scott R, ROE, Larry A, SILANO, Al, MAYNARD, David P, FERRARO, Ned
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Hybrid microelectronics
thick films
Micro- and nanoelectromechanical devices (mems/nems)
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0964-1726
1361-665X