Characterization of transformer coupled oxygen plasmas by trace rare gases-optical emission spectroscopy and Langmuir probe analysis

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Bibliographic Details
Published in:Plasma sources science & technology 2000-05, Vol.9 (2), p.116-127
Main Authors: Fuller, N C M, Malyshev, M V, Donnelly, V M, Herman, Irving P
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical instruments, equipment and techniques
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma diagnostic techniques and instrumentation
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/9/2/304