Study of lithography profiles developed on non-planar Si surfaces

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Bibliographic Details
Published in:Nanotechnology 1999-12, Vol.10 (4), p.421-427
Main Authors: Sirakoulis, G Ch, Karafyllidis, I, Mardiris, V, Thanailakis, A
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/10/4/311