Plasma recovery in plasma immersion ion implantation: dependence on pulse frequency and duty cycle

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2002-03, Vol.35 (5), p.462-467
Main Authors: Briehl, Boris, Urbassek, Herbert M
Format: Article
Language:English
Subjects:
Exact sciences and technology
Particle-in-cell method
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma simulation
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/35/5/308