Laser micromachining for applications in thin film technology

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Bibliographic Details
Main Authors: PFLEGING, W, LUDWIG, A, SEEMANN, K, PREU, R, MÄCKEL, H, GLUNZ, S. W
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0169-4332
1873-5584