Excimer laser micro machining : fabrication and applications of dielectric masks

Saved in:
Bibliographic Details
Main Authors: IHLEMANN, J, RUBAHN, K
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Materials science
Microelectronic fabrication (materials and surfaces technology)
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surface cleaning, etching, patterning
Surface treatments
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0169-4332
1873-5584