The electrolysis of water : an actuation principle for MEMS with a big opportunity: Miniature Actuators

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Bibliographic Details
Published in:Mechatronics (Oxford) 2000, Vol.10 (4-5), p.571-581
Main Authors: NEAGU, C, JANSEN, H, GARDENIERS, H, ELWENSPOEK, M
Format: Article
Language:English
Subjects:
Applied sciences
Direct energy conversion and energy accumulation
Electrical engineering. Electrical power engineering
Electrical power engineering
Electrochemical conversion: primary and secondary batteries, fuel cells
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
Online Access:Get full text
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ISSN:0957-4158
1873-4006