Precise chemical analysis development for Si and GaAs surfaces

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Bibliographic Details
Published in:Journal of materials science. Materials in electronics 2002, Vol.13 (6), p.315-318
Main Authors: BRIANTSEVA, T, LEBEDEVA, Z, LIOUBTCHENKO, D, NOLAN, M, PEROVA, T, MOORE, A, BERWICK, K
Format: Article
Language:Russian
Online Access:Get full text
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ISSN:0957-4522
1573-482X