Epitaxial growth of thick 4H-SiC layers in a vertical radiant-heating reactor

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Bibliographic Details
Main Authors: TSUCHIDA, H, KAMATA, I, JIKIMOTO, T, IZUMI, K
Format: Conference Proceeding
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Electrical properties of specific thin films
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Other inorganic semiconductors
Physics
Vapor phase epitaxy
growth from vapor phase
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ISSN:0022-0248
1873-5002