Adaptive contact for improving the behavior of silicon MEMS switches

• Published in: Journal of micromechanics and microengineering 2002-09, Vol.12 (5), p.696-701, Article 328
• Main Authors: Miao, Lu, Zhengping, Zhao, Xiaodong, Hu, Xuefeng, Zou, Haifeng, Lin, Ronghui, Guo
• Format: Article
• Language: English
• Subjects: Applied sciences; Computer simulation; Electric contacts; Electric potential; Electric switches; Electronics; Exact sciences and technology; Finite element method; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Integrated circuit layout; Integrated circuit testing; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Micro- and nanoelectromechanical devices (mems/nems); Micromechanical devices and systems; Optimization; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Silicon wafers; Single crystals
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/12/5/328

The concept of adaptive contacts is proposed to reduce the tilting effect of MEMS switches resulting from the tolerance of the fabricating process. Using finite element analysis, two types of MEMS switches with adaptive contacts, including free-clamped and clamped-clamped structures, are designed and tested. The results are compared with the characteristics of a typical solid contact switch, which show that the pull-in voltage decreases from 40-60 volts to 15-25 volts after several initial collisions in the case of the free-clamped structure. The properties of the fabricated device show good agreement with the results obtained from finite element analysis. (Author)