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The etching of Ti adhesion layers in H2O2 solutions

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2002-05, Vol.149 (5), p.C256-C260
Main Authors: VAN DEN MEERAKKER, J. E. A. M, METSEMAKERS, J. P, GIESBERS, J. B
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1466859