Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films

(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties,...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2002-09, Vol.38 (5), p.3147-3149
Main Authors: Munakata, M., Motoyama, M., Yagi, M., Ito, T., Shimada, Y., Yamaguchi, M., Arai, K.-I.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electric resistance
Exact sciences and technology
Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures)
Magnetic anisotropy
Magnetic films
Magnetic properties
Magnetic properties and materials
Magnetic properties of surface, thin films and multilayers
Magnetic resonance
Magnetism
Permeability
Perpendicular magnetic anisotropy
Physics
Resonant frequency
Saturation magnetization
Soft magnetic materials
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Summary:(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2002.802424