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Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films
(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties,...
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Published in: | IEEE transactions on magnetics 2002-09, Vol.38 (5), p.3147-3149 |
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creator | Munakata, M. Motoyama, M. Yagi, M. Ito, T. Shimada, Y. Yamaguchi, M. Arai, K.-I. |
description | (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range. |
doi_str_mv | 10.1109/TMAG.2002.802424 |
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The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.</description><identifier>ISSN: 0018-9464</identifier><identifier>EISSN: 1941-0069</identifier><identifier>DOI: 10.1109/TMAG.2002.802424</identifier><identifier>CODEN: IEMGAQ</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Electric resistance ; Exact sciences and technology ; Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures) ; Magnetic anisotropy ; Magnetic films ; Magnetic properties ; Magnetic properties and materials ; Magnetic properties of surface, thin films and multilayers ; Magnetic resonance ; Magnetism ; Permeability ; Perpendicular magnetic anisotropy ; Physics ; Resonant frequency ; Saturation magnetization ; Soft magnetic materials</subject><ispartof>IEEE transactions on magnetics, 2002-09, Vol.38 (5), p.3147-3149</ispartof><rights>2003 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2002</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3</citedby><cites>FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1042479$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,314,780,784,789,790,23930,23931,25140,27924,27925,54796</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=13996610$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Munakata, M.</creatorcontrib><creatorcontrib>Motoyama, M.</creatorcontrib><creatorcontrib>Yagi, M.</creatorcontrib><creatorcontrib>Ito, T.</creatorcontrib><creatorcontrib>Shimada, Y.</creatorcontrib><creatorcontrib>Yamaguchi, M.</creatorcontrib><creatorcontrib>Arai, K.-I.</creatorcontrib><title>Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films</title><title>IEEE transactions on magnetics</title><addtitle>TMAG</addtitle><description>(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.</description><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Electric resistance</subject><subject>Exact sciences and technology</subject><subject>Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures)</subject><subject>Magnetic anisotropy</subject><subject>Magnetic films</subject><subject>Magnetic properties</subject><subject>Magnetic properties and materials</subject><subject>Magnetic properties of surface, thin films and multilayers</subject><subject>Magnetic resonance</subject><subject>Magnetism</subject><subject>Permeability</subject><subject>Perpendicular magnetic anisotropy</subject><subject>Physics</subject><subject>Resonant frequency</subject><subject>Saturation magnetization</subject><subject>Soft magnetic materials</subject><issn>0018-9464</issn><issn>1941-0069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNpdkUFrFDEUx4MouFbvgpcgKO1hZpJMkpkc28VWodKD1WvIZl86KTOTNckI-xn80mZ3C4qHkPfg93685I_QW0pqSolq7r9e3tSMEFb3hHHGn6EVVZxWhEj1HK0IoX2luOQv0auUHkvLBSUr9PsHxD0e_MOAYQSbo7dmxBGST9n_8nmPzbzFA2SIwUwh7oawJJxyXGxeIuDgcAou48k8zJC9xefr0KRlg1tRy-YajrUgzdWxoLzmzUV1_s3fHXvWXOA8-Bk7P07pNXrhzJjgzdN9hr5ff7pff65u726-rC9vK8upyBXvRce6DbQgt8q0sDFCcGOZFMAdI65TREjVSsFd33OwxhWIMbNlTkCroD1DH0_eXQw_F0hZTz5ZGEczQ3mdZn3HhJRdAd__Bz6GJc5lN13MgpbDC0ROkI0hpQhO76KfTNxrSvQhGn2IRh-i0adoysiHJ69J5btdNLP16e9cq5SUlBTu3YnzAPCPtjg61f4BYF2U9w</recordid><startdate>20020901</startdate><enddate>20020901</enddate><creator>Munakata, M.</creator><creator>Motoyama, M.</creator><creator>Yagi, M.</creator><creator>Ito, T.</creator><creator>Shimada, Y.</creator><creator>Yamaguchi, M.</creator><creator>Arai, K.-I.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20020901</creationdate><title>Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films</title><author>Munakata, M. ; Motoyama, M. ; Yagi, M. ; Ito, T. ; Shimada, Y. ; Yamaguchi, M. ; Arai, K.-I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Electric resistance</topic><topic>Exact sciences and technology</topic><topic>Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures)</topic><topic>Magnetic anisotropy</topic><topic>Magnetic films</topic><topic>Magnetic properties</topic><topic>Magnetic properties and materials</topic><topic>Magnetic properties of surface, thin films and multilayers</topic><topic>Magnetic resonance</topic><topic>Magnetism</topic><topic>Permeability</topic><topic>Perpendicular magnetic anisotropy</topic><topic>Physics</topic><topic>Resonant frequency</topic><topic>Saturation magnetization</topic><topic>Soft magnetic materials</topic><toplevel>online_resources</toplevel><creatorcontrib>Munakata, M.</creatorcontrib><creatorcontrib>Motoyama, M.</creatorcontrib><creatorcontrib>Yagi, M.</creatorcontrib><creatorcontrib>Ito, T.</creatorcontrib><creatorcontrib>Shimada, Y.</creatorcontrib><creatorcontrib>Yamaguchi, M.</creatorcontrib><creatorcontrib>Arai, K.-I.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEL</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on magnetics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Munakata, M.</au><au>Motoyama, M.</au><au>Yagi, M.</au><au>Ito, T.</au><au>Shimada, Y.</au><au>Yamaguchi, M.</au><au>Arai, K.-I.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films</atitle><jtitle>IEEE transactions on magnetics</jtitle><stitle>TMAG</stitle><date>2002-09-01</date><risdate>2002</risdate><volume>38</volume><issue>5</issue><spage>3147</spage><epage>3149</epage><pages>3147-3149</pages><issn>0018-9464</issn><eissn>1941-0069</eissn><coden>IEMGAQ</coden><abstract>(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/TMAG.2002.802424</doi><tpages>3</tpages></addata></record> |
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subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Electric resistance Exact sciences and technology Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures) Magnetic anisotropy Magnetic films Magnetic properties Magnetic properties and materials Magnetic properties of surface, thin films and multilayers Magnetic resonance Magnetism Permeability Perpendicular magnetic anisotropy Physics Resonant frequency Saturation magnetization Soft magnetic materials |
title | Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films |
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