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Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films

(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties,...

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Published in:IEEE transactions on magnetics 2002-09, Vol.38 (5), p.3147-3149
Main Authors: Munakata, M., Motoyama, M., Yagi, M., Ito, T., Shimada, Y., Yamaguchi, M., Arai, K.-I.
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cited_by cdi_FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3
cites cdi_FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3
container_end_page 3149
container_issue 5
container_start_page 3147
container_title IEEE transactions on magnetics
container_volume 38
creator Munakata, M.
Motoyama, M.
Yagi, M.
Ito, T.
Shimada, Y.
Yamaguchi, M.
Arai, K.-I.
description (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.
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fullrecord <record><control><sourceid>proquest_pasca</sourceid><recordid>TN_cdi_pascalfrancis_primary_13996610</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1042479</ieee_id><sourcerecordid>28725667</sourcerecordid><originalsourceid>FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3</originalsourceid><addsrcrecordid>eNpdkUFrFDEUx4MouFbvgpcgKO1hZpJMkpkc28VWodKD1WvIZl86KTOTNckI-xn80mZ3C4qHkPfg93685I_QW0pqSolq7r9e3tSMEFb3hHHGn6EVVZxWhEj1HK0IoX2luOQv0auUHkvLBSUr9PsHxD0e_MOAYQSbo7dmxBGST9n_8nmPzbzFA2SIwUwh7oawJJxyXGxeIuDgcAou48k8zJC9xefr0KRlg1tRy-YajrUgzdWxoLzmzUV1_s3fHXvWXOA8-Bk7P07pNXrhzJjgzdN9hr5ff7pff65u726-rC9vK8upyBXvRce6DbQgt8q0sDFCcGOZFMAdI65TREjVSsFd33OwxhWIMbNlTkCroD1DH0_eXQw_F0hZTz5ZGEczQ3mdZn3HhJRdAd__Bz6GJc5lN13MgpbDC0ROkI0hpQhO76KfTNxrSvQhGn2IRh-i0adoysiHJ69J5btdNLP16e9cq5SUlBTu3YnzAPCPtjg61f4BYF2U9w</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>884518454</pqid></control><display><type>article</type><title>Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films</title><source>IEEE Xplore (Online service)</source><creator>Munakata, M. ; Motoyama, M. ; Yagi, M. ; Ito, T. ; Shimada, Y. ; Yamaguchi, M. ; Arai, K.-I.</creator><creatorcontrib>Munakata, M. ; Motoyama, M. ; Yagi, M. ; Ito, T. ; Shimada, Y. ; Yamaguchi, M. ; Arai, K.-I.</creatorcontrib><description>(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.</description><identifier>ISSN: 0018-9464</identifier><identifier>EISSN: 1941-0069</identifier><identifier>DOI: 10.1109/TMAG.2002.802424</identifier><identifier>CODEN: IEMGAQ</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Electric resistance ; Exact sciences and technology ; Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures) ; Magnetic anisotropy ; Magnetic films ; Magnetic properties ; Magnetic properties and materials ; Magnetic properties of surface, thin films and multilayers ; Magnetic resonance ; Magnetism ; Permeability ; Perpendicular magnetic anisotropy ; Physics ; Resonant frequency ; Saturation magnetization ; Soft magnetic materials</subject><ispartof>IEEE transactions on magnetics, 2002-09, Vol.38 (5), p.3147-3149</ispartof><rights>2003 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2002</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3</citedby><cites>FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1042479$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,314,780,784,789,790,23930,23931,25140,27924,27925,54796</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=13996610$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Munakata, M.</creatorcontrib><creatorcontrib>Motoyama, M.</creatorcontrib><creatorcontrib>Yagi, M.</creatorcontrib><creatorcontrib>Ito, T.</creatorcontrib><creatorcontrib>Shimada, Y.</creatorcontrib><creatorcontrib>Yamaguchi, M.</creatorcontrib><creatorcontrib>Arai, K.-I.</creatorcontrib><title>Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films</title><title>IEEE transactions on magnetics</title><addtitle>TMAG</addtitle><description>(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.</description><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Electric resistance</subject><subject>Exact sciences and technology</subject><subject>Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures)</subject><subject>Magnetic anisotropy</subject><subject>Magnetic films</subject><subject>Magnetic properties</subject><subject>Magnetic properties and materials</subject><subject>Magnetic properties of surface, thin films and multilayers</subject><subject>Magnetic resonance</subject><subject>Magnetism</subject><subject>Permeability</subject><subject>Perpendicular magnetic anisotropy</subject><subject>Physics</subject><subject>Resonant frequency</subject><subject>Saturation magnetization</subject><subject>Soft magnetic materials</subject><issn>0018-9464</issn><issn>1941-0069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNpdkUFrFDEUx4MouFbvgpcgKO1hZpJMkpkc28VWodKD1WvIZl86KTOTNckI-xn80mZ3C4qHkPfg93685I_QW0pqSolq7r9e3tSMEFb3hHHGn6EVVZxWhEj1HK0IoX2luOQv0auUHkvLBSUr9PsHxD0e_MOAYQSbo7dmxBGST9n_8nmPzbzFA2SIwUwh7oawJJxyXGxeIuDgcAou48k8zJC9xefr0KRlg1tRy-YajrUgzdWxoLzmzUV1_s3fHXvWXOA8-Bk7P07pNXrhzJjgzdN9hr5ff7pff65u726-rC9vK8upyBXvRce6DbQgt8q0sDFCcGOZFMAdI65TREjVSsFd33OwxhWIMbNlTkCroD1DH0_eXQw_F0hZTz5ZGEczQ3mdZn3HhJRdAd__Bz6GJc5lN13MgpbDC0ROkI0hpQhO76KfTNxrSvQhGn2IRh-i0adoysiHJ69J5btdNLP16e9cq5SUlBTu3YnzAPCPtjg61f4BYF2U9w</recordid><startdate>20020901</startdate><enddate>20020901</enddate><creator>Munakata, M.</creator><creator>Motoyama, M.</creator><creator>Yagi, M.</creator><creator>Ito, T.</creator><creator>Shimada, Y.</creator><creator>Yamaguchi, M.</creator><creator>Arai, K.-I.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20020901</creationdate><title>Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films</title><author>Munakata, M. ; Motoyama, M. ; Yagi, M. ; Ito, T. ; Shimada, Y. ; Yamaguchi, M. ; Arai, K.-I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Electric resistance</topic><topic>Exact sciences and technology</topic><topic>Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures)</topic><topic>Magnetic anisotropy</topic><topic>Magnetic films</topic><topic>Magnetic properties</topic><topic>Magnetic properties and materials</topic><topic>Magnetic properties of surface, thin films and multilayers</topic><topic>Magnetic resonance</topic><topic>Magnetism</topic><topic>Permeability</topic><topic>Perpendicular magnetic anisotropy</topic><topic>Physics</topic><topic>Resonant frequency</topic><topic>Saturation magnetization</topic><topic>Soft magnetic materials</topic><toplevel>online_resources</toplevel><creatorcontrib>Munakata, M.</creatorcontrib><creatorcontrib>Motoyama, M.</creatorcontrib><creatorcontrib>Yagi, M.</creatorcontrib><creatorcontrib>Ito, T.</creatorcontrib><creatorcontrib>Shimada, Y.</creatorcontrib><creatorcontrib>Yamaguchi, M.</creatorcontrib><creatorcontrib>Arai, K.-I.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEL</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on magnetics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Munakata, M.</au><au>Motoyama, M.</au><au>Yagi, M.</au><au>Ito, T.</au><au>Shimada, Y.</au><au>Yamaguchi, M.</au><au>Arai, K.-I.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films</atitle><jtitle>IEEE transactions on magnetics</jtitle><stitle>TMAG</stitle><date>2002-09-01</date><risdate>2002</risdate><volume>38</volume><issue>5</issue><spage>3147</spage><epage>3149</epage><pages>3147-3149</pages><issn>0018-9464</issn><eissn>1941-0069</eissn><coden>IEMGAQ</coden><abstract>(Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) soft magnetic films with electrical resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm (1 /spl times/ 10/sup -4/ /spl Omega/m) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 /spl mu//spl Omega/ /spl middot/ cm (1.156 /spl times/ 10/sup -3/ /spl Omega/m) was obtained with a large uniaxial anisotropy field H/sub k/ of about 250 Oe, a hard axis coercivity H/sub ch/ of 5.6 Oe, and a saturated magnetization 4/spl pi/M/sub s/ of 8.3 kG. The real part of the relative permeability /spl mu/'/sub r/ was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 /spl mu//spl Omega/ /spl middot/ cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/TMAG.2002.802424</doi><tpages>3</tpages></addata></record>
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ispartof IEEE transactions on magnetics, 2002-09, Vol.38 (5), p.3147-3149
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subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electric resistance
Exact sciences and technology
Interfacial magnetic properties (multilayers, magnetic quantum wells, superlattices, magnetic heterostructures)
Magnetic anisotropy
Magnetic films
Magnetic properties
Magnetic properties and materials
Magnetic properties of surface, thin films and multilayers
Magnetic resonance
Magnetism
Permeability
Perpendicular magnetic anisotropy
Physics
Resonant frequency
Saturation magnetization
Soft magnetic materials
title Very high electrical resistivity and heteroamorphous structure of soft magnetic (Co/sub 35.6/Fe/sub 50/B/sub 14.4/)-(SiO/sub 2/) thin films
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-27T06%3A54%3A27IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_pasca&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Very%20high%20electrical%20resistivity%20and%20heteroamorphous%20structure%20of%20soft%20magnetic%20(Co/sub%2035.6/Fe/sub%2050/B/sub%2014.4/)-(SiO/sub%202/)%20thin%20films&rft.jtitle=IEEE%20transactions%20on%20magnetics&rft.au=Munakata,%20M.&rft.date=2002-09-01&rft.volume=38&rft.issue=5&rft.spage=3147&rft.epage=3149&rft.pages=3147-3149&rft.issn=0018-9464&rft.eissn=1941-0069&rft.coden=IEMGAQ&rft_id=info:doi/10.1109/TMAG.2002.802424&rft_dat=%3Cproquest_pasca%3E28725667%3C/proquest_pasca%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c415t-485727be3e6d9a3eba554ac265e4f20f7905693654f884ecafa3e22ad2f5e39e3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=884518454&rft_id=info:pmid/&rft_ieee_id=1042479&rfr_iscdi=true