The atomic processes of ultraviolet laser-induced etching of chlorinated silicon (1 1 1) surface

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Bibliographic Details
Main Authors: AMASUGA, Hirotaka, NAKAMURA, Manami, MERA, Yutaka, MAEDA, Koji
Format: Conference Proceeding
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Surface cleaning, etching, patterning
Surface treatments
Online Access:Get full text
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ISSN:0169-4332
1873-5584