Dynamic stress investigations for cubic boron nitride films deposited by triode sputtering technique

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Bibliographic Details
Main Authors: DJOUADI, M. A, MORTET, V, KHANDOZHKO, S, JOUAN, P. Y, NOUET, G
Format: Conference Proceeding
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Mechanical and acoustical properties
Physical properties of thin films, nonelectronic
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Online Access:Get full text
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ISSN:0257-8972
1879-3347