Some investigations in holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS): Microsystems metrology. Part II

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Bibliographic Details
Published in:Optics and lasers in engineering 2001, Vol.36 (5), p.475-485
Main Authors: WERNICKE, Günther, BOUAMAMA, Larbi, KRUSCHKE, Oliver, DEMOLI, Nazif, GRUBER, Hartmut, KRÜGER, Sven
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Holographic interferometry
other holographic techniques
Holography
Measurements common to several branches of physics and astronomy
Metrology, measurements and laboratory procedures
Micro- and nanoelectromechanical devices (mems/nems)
Optics
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements)
Spatial dimensions (eg, position, lengths, volume, angles, displacements, including nanometer-scale displacements)
Online Access:Get full text
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ISSN:0143-8166
1873-0302