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Structural characteristics of Al2O3 thin films prepared by spray pyrolysis
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Published in: | Journal of physics. Condensed matter 2001-12, Vol.13 (50), p.L955-L959 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0953-8984 1361-648X |
DOI: | 10.1088/0953-8984/13/50/101 |