Loading…

Electrical characterization of the SiON/Si interface for applications on optical and MOS devices

Saved in:

Bibliographic Details
Published in:	Semiconductor science and technology 2003-01, Vol.18 (1), p.56-59
Main Authors:	Konofaos, N, Evangelou, E K
Format:	Article
Language:	English
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electrical properties of specific thin films Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport in interface structures Exact sciences and technology Other inorganic semiconductors Other semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions Physics Surface and interface electron states Surface states, band structure, electron density of states
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!