Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine

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Bibliographic Details
Main Authors: KOLESAR, Edward S, RUFF, Matthew D, BOSCH, Jorge E, WILKS, Richard J, ODOM, William E, JAYACHADRAN, Joseph A, MCALLISTER, Justin B, KO, Simon Y, HOWARD, Jeffery T, ALLEN, Peter B, WILKEN, Josh M, BOYDSTON, Noah C
Format: Conference Proceeding
Language:English
Subjects:
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
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ISSN:0040-6090
1879-2731