Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks

Saved in:
Bibliographic Details
Main Authors: DE WITTE, H, CONARD, T, VANDERVORST, W, GIJBELS, R
Format: Conference Proceeding
Language:English
Subjects:
Atomic, molecular, and ion beam impact and interactions with surfaces
Chemical composition analysis, chemical depth and dopant profiling
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Dielectric thin films
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Electron and ion emission by liquids and solids
impact phenomena
Exact sciences and technology
Impact phenomena (including electron spectra and sputtering)
Materials science
Materials testing
Physics
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0169-4332
1873-5584