Industrialization of MEVVA source ion implantation

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Bibliographic Details
Main Authors: ZHANG TONGHE, ZHAN GHUIXING, JI CHANGZHOU, ZHANG XIAOJI, WU YUGUANG, MA FURONG, LIANG HONG, SHOU HANZHANG, SHI JIANZHONG
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Online Access:Get full text
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ISSN:0257-8972