Industrialization of MEVVA source ion implantation

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Main Authors: ZHANG TONGHE, ZHAN GHUIXING, JI CHANGZHOU, ZHANG XIAOJI, WU YUGUANG, MA FURONG, LIANG HONG, SHOU HANZHANG, SHI JIANZHONG
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
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container_end_page 8
container_issue
container_start_page 1
container_title
container_volume 128-29
creator ZHANG TONGHE
ZHAN GHUIXING
JI CHANGZHOU
ZHANG XIAOJI
WU YUGUANG
MA FURONG
LIANG HONG
SHOU HANZHANG
SHI JIANZHONG
description
format conference_proceeding
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identifier ISSN: 0257-8972
ispartof Surface & coatings technology, 2000, Vol.128-29, p.1-8
issn 0257-8972
language eng
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source ScienceDirect Freedom Collection
subjects Applied sciences
Exact sciences and technology
Metals. Metallurgy
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
title Industrialization of MEVVA source ion implantation
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