Erbium and germanium profiles in Si1-xGex layers grown by silicon sublimation-source molecular-beam epitaxy in GeH4

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Bibliographic Details
Published in:Inorganic materials 2003, Vol.39 (1), p.3-5
Main Authors: SHENGUROV, V. G, SVETLOV, S. P, CHALKOV, V. Yu, ANDREEV, B. A, KRASIL'NIK, Z. F, BER, B. Ya, DROZDOV, Yu. N
Format: Article
Language:eng ; rus
Online Access:Get full text
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ISSN:0020-1685
1608-3172
DOI:10.1023/A:1021822715712