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A robust micro conveyer realized by arrayed polimide joint actuators

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2000-09, Vol.10 (3), p.337-349
Main Authors: EBEFORS, T, MATTSSON, J. U, KÄLVESTEN, E, STEMME, G
Format: Article
Language:English
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/10/3/307