Annealing condition dependence of electrical characteristics for Dy2O3/Si(100) structures

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Bibliographic Details
Main Authors: TAGUCHI, Junichi, YAMAMOTO, Hiroyuki, TONOTANI, Junichi, OHMI, Shun-Ichiro, IWAI, Hiroshi
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Testing, measurement, noise and reliability
Online Access:Get full text
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DOI:10.1109/ESSDERC.2002.195000