Characterization by ion beams of surfaces and interfaces of alternative materials for future microelectronic devices

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Bibliographic Details
Main Authors: KRUG, C, STEDILE, F. C, RADTKE, C, DA ROSA, E. B. O, MORALS, J, FREIRE, F. L, BAUMVOL, I. J. R
Format: Conference Proceeding
Language:English
Subjects:
Atomic, molecular, and ion beam impact and interactions with surfaces
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Electron and ion emission by liquids and solids
impact phenomena
Exact sciences and technology
Impact phenomena (including electron spectra and sputtering)
Interface structure and roughness
Physics
Solid surfaces and solid-solid interfaces
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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ISSN:0169-4332
1873-5584