Deposition of TCO films by reactive magnetron sputtering from metallic Zn:Al alloy targets

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Bibliographic Details
Main Authors: MAY, Christian, MENNER, Richard, STRÜMPFEL, Johannes, OERTEL, Mike, SPRECHER, Bernd
Format: Conference Proceeding
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Online Access:Get full text
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ISSN:0257-8972
1879-3347