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Prediction of operating region of pulse-modulated radio frequency inductively coupled thermal plasma
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Published in: | Journal of physics. D, Applied physics Applied physics, 2000-08, Vol.33 (15), p.1843-1853 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0022-3727 1361-6463 |
DOI: | 10.1088/0022-3727/33/15/314 |