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Prediction of operating region of pulse-modulated radio frequency inductively coupled thermal plasma

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2000-08, Vol.33 (15), p.1843-1853
Main Authors: Hossain, M M, Paul, K C, Tanaka, Y, Sakuta, T, Ishigaki, T
Format: Article
Language:English
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/33/15/314