Lattice Monte Carlo models of thin film deposition: Process and materials modeling in IC fabrication

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Bibliographic Details
Published in:Thin solid films 2000, Vol.365 (2), p.189-200
Main Authors: GILMER, George H, HUANG, Hanchen, DIAZ DE LA RUBIA, Tomas, DALLA TORRE, Jacques, BAUMANN, Frieder
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Theory and models of film growth
Thin film structure and morphology
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ISSN:0040-6090
1879-2731