Micromachining of SrTiO3 steps for high-Tc step edge junction dc SQUIDs

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2004-01, Vol.14 (1), p.1-5
Main Authors: Wang, Jing, Han, Bing, Chen, Genghua, Xu, Fengzhi, Yang, Qiansheng, Cui, Tianhong
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/14/1/301