Characteristics of VHF-excited SiH4/H2 plasmas using a ladder-shaped electrode

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Bibliographic Details
Main Authors: MASHIMA, Hiroshi, TAKEUCHI, Yoshiaki, MURATA, Masayoshi, NODA, Matsuhei, TAKATSUKA, Hiromu, KAWASAKI, Ikutarou, KAWAI, Yoshinobu
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Production techniques
Surface treatment
Online Access:Get full text
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ISSN:0257-8972