Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methane plasma

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Bibliographic Details
Main Authors: MISINA, Martin, POKORNY, Petr
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Production techniques
Surface treatment
Online Access:Get full text
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ISSN:0257-8972