Energy-resolved mass spectroscopy of Ar-C2H2-N2 plasma, performed during ion plating of TiC and TiN hard coatings

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Bibliographic Details
Main Authors: MACEK, Marijan, MISINA, Martin, CEKADA, Miha, PANJAN, Peter
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Production techniques
Surface treatment
Online Access:Get full text
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ISSN:0257-8972