Interdigital sensors and transducers

This review paper focuses on interdigital electrodes-a geometric structure encountered in a wide variety of sensor and transducer designs. Physical and chemical principles behind the operation of these devices vary so much across different fields of science and technology that the common features pr...

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Bibliographic Details
Published in:Proceedings of the IEEE 2004-05, Vol.92 (5), p.808-845
Main Authors: Mamishev, A.V., Sundara-Rajan, K., Fumin Yang, Yanqing Du, Zahn, M.
Format: Article
Language:English
Subjects:
Acoustic sensors
Acoustics
Biological
Biosensors
Capacitive sensors
Chemical and biological sensors
Chemical technology
Devices
Dielectrics
Electrodes
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Mathematical models
Micromechanical devices
Parameter estimation
Physics
Sensors
Transducers
Transduction
acoustical devices for the generation and reproduction of sound
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Description
Summary:This review paper focuses on interdigital electrodes-a geometric structure encountered in a wide variety of sensor and transducer designs. Physical and chemical principles behind the operation of these devices vary so much across different fields of science and technology that the common features present in all devices are often overlooked. This paper attempts to bring under one umbrella capacitive, inductive, dielectric, piezoacoustic, chemical, biological, and microelectromechanical interdigital sensors and transducers. The paper also provides historical perspective, discusses fabrication techniques, modeling of sensor parameters, application examples, and directions of future research.
ISSN:0018-9219
1558-2256
DOI:10.1109/JPROC.2004.826603